发明授权
US08729517B2 Nonvolatile semiconductor memory device and method for manufacturing nonvolatile semiconductor memory device
有权
用于制造非易失性半导体存储器件的非易失性半导体存储器件和方法
- 专利标题: Nonvolatile semiconductor memory device and method for manufacturing nonvolatile semiconductor memory device
- 专利标题(中): 用于制造非易失性半导体存储器件的非易失性半导体存储器件和方法
-
申请号: US13044951申请日: 2011-03-10
-
公开(公告)号: US08729517B2公开(公告)日: 2014-05-20
- 发明人: Takuya Konno , Kazuhiko Yamamoto
- 申请人: Takuya Konno , Kazuhiko Yamamoto
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-136898 20100616
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
According to one embodiment, a nonvolatile semiconductor memory device includes a first interconnect, a second interconnect and a resistance change layer. The first interconnect extends in a first direction on a major surface of a substrate. The second interconnect extends in a second direction non-parallel to the first direction. The resistance change layer includes a conductive nanomaterial, the resistance change layer located between the first interconnect and the second interconnect and being capable of reversibly changing between a first resistance state and a second resistance state by a voltage applied or a current supplied through the first interconnect and the second interconnect. The resistance change layer has a density varied along a third direction generally perpendicular to the first direction and the second direction.
公开/授权文献
信息查询
IPC分类: