Invention Grant
- Patent Title: Discontinuous guard ring
- Patent Title (中): 不连续的护环
-
Application No.: US13437273Application Date: 2012-04-02
-
Publication No.: US08729664B2Publication Date: 2014-05-20
- Inventor: Jeffrey P. Gambino , Mark D. Jaffe , Mark D. Levy , John C. Malinowski
- Applicant: Jeffrey P. Gambino , Mark D. Jaffe , Mark D. Levy , John C. Malinowski
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Nicholas L. Cadmus
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L23/52 ; H01L29/47 ; H01L27/095

Abstract:
An integrated circuit chip comprising a guard ring formed on a semiconductor substrate that surrounds the active region of the integrated circuit chip and extends from the semiconductor substrate through one or more of a plurality of wiring levels. The guard ring comprises stacked metal lines with spaces breaking up each respective metal line. Each space may be formed such that it partially overlies the space in the metal line directly below but does not overlie any other space. Alternatively, each space may also be formed such that each space is at least completely overlying the space in the metal line below it.
Public/Granted literature
- US20130256826A1 DISCONTINUOUS GUARD RING Public/Granted day:2013-10-03
Information query
IPC分类: