Invention Grant
- Patent Title: Illumination system for a microlithographic projection exposure apparatus
- Patent Title (中): 用于微光刻投影曝光装置的照明系统
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Application No.: US13181033Application Date: 2011-07-12
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Publication No.: US08730455B2Publication Date: 2014-05-20
- Inventor: Damian Fiolka , Manfred Maul , Axel Scholz , Markus Deguenther , Johannes Wangler , Vladimir Davydenko
- Applicant: Damian Fiolka , Manfred Maul , Axel Scholz , Markus Deguenther , Johannes Wangler , Vladimir Davydenko
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/72 ; G03F7/20 ; G03B27/68 ; G03B27/42 ; G03B27/52

Abstract:
An illumination system for a microlithographic projection exposure step-and-scan apparatus has a light source, a first optical raster element and a second optical raster element. The first optical raster element extends in a first pupil plane of the illumination system and is designed such that the geometrical optical flux of the system is increased perpendicular to a scan direction of the projection exposure apparatus. The second optical raster element extends in a second pupil plane of the illumination system, which is not necessarily different from the first pupil plane, and is designed such that the geometrical optical flux of the system is increased in the scan direction and perpendicular thereto. This makes it possible to improve the irradiance uniformity in a reticle plane.
Public/Granted literature
- US20110285978A1 ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2011-11-24
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