Invention Grant
- Patent Title: Methods and apparatus for modeling electromagnetic scattering properties of microscopic structures and methods and apparatus for reconstruction of microscopic structures
- Patent Title (中): 用于建模微观结构的电磁散射性质的方法和装置以及用于微观结构重建的方法和装置
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Application No.: US12877905Application Date: 2010-09-08
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Publication No.: US08731882B2Publication Date: 2014-05-20
- Inventor: Martijn Constant Van Beurden
- Applicant: Martijn Constant Van Beurden
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G06G7/56
- IPC: G06G7/56 ; G06F17/10 ; G01B11/02 ; G01B11/30 ; G06F17/50 ; G01R15/00

Abstract:
Improved convergence in the volume-integral method (VIM) of calculating electromagnetic scattering properties of a structure is achieved by numerically solving a volume integral equation for a vector field, F, rather than the electric field, E. The electric field, E, is determined from the vector field, F, after solving of the volume integral equation. The vector field, F, may be related to the electric field, E, by a change of basis, and may be continuous at material boundaries where the electric field, E, has discontinuities. Convolutions of the vector field, F, are performed using convolution operators according to the finite Laurent rule, which allows for efficient matrix-vector products using Fast Fourier Transforms. An invertible convolution-and-change-of-basis operator, C, is configured to transform the vector field, F, to the electric field, E, by performing a change of basis according to material and geometric properties of the periodic structure.
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