发明授权
- 专利标题： Piezoelectric device, process for producing the same, and liquid discharge device
- 专利标题（中）： 压电元件及其制造方法以及液体排出装置
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申请号： US13347333申请日： 2012-01-10
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公开(公告)号： US08733905B2公开(公告)日： 2014-05-27
- 发明人: Takamichi Fujii , Takayuki Naono , Yoshikazu Hishinuma
- 申请人： Takamichi Fujii , Takayuki Naono , Yoshikazu Hishinuma
- 申请人地址： JP Tokyo
- 专利权人： FUJIFILM Corporation
- 当前专利权人： FUJIFILM Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Birch, Stewart, Kolasch & Birch, LLP.
- 优先权： JP2007-055664 20070306
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.
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