Invention Grant
US08734584B2 Systems and methods for creating crystallographic-orientation controlled poly-silicon films 有权
用于制造晶体取向控制的多晶硅膜的系统和方法

Systems and methods for creating crystallographic-orientation controlled poly-silicon films
Abstract:
In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.
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