发明授权
- 专利标题： Standard member for calibration and method of manufacturing the same and scanning electron microscope using the same
- 专利标题（中）： 用于校准的标准构件及其制造方法及使用其的扫描电子显微镜
-
申请号： US13995627申请日： 2011-12-26
-
公开(公告)号： US08735816B2公开(公告)日： 2014-05-27
- 发明人: Yoshinori Nakayama , Takashi Tase , Jiro Yamamoto , Osamu Inoue
- 申请人： Yoshinori Nakayama , Takashi Tase , Jiro Yamamoto , Osamu Inoue
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Miles & Stockbridge P.C.
- 优先权： JP2010-291517 20101228
- 国际申请： PCT/JP2011/007245 WO 20111226
- 国际公布： WO2012/090465 WO 20120705
- 主分类号： G01N23/00
- IPC分类号： G01N23/00 ; G21K7/00
摘要：
A standard member for automatically, stably, and highly accurately performing magnification calibration used in an electron microscope, the standard member including, on the same plane, a multilayer film cross section formed by alternately laminating materials different from each other, a plurality of first mark patterns arranged across a first silicon layer and in parallel to the multilayer film cross section, at least a pair of second mark patterns arranged across a second silicon layer thicker than the first silicon layer on the opposite side of the first mark patterns with respect to the multilayer film cross section and in parallel to the multilayer film cross section, and a silicon layer arranged on the outer side of the first mark patterns and the second mark patterns with respect to the multilayer film cross section.