发明授权
- 专利标题: Pyroelectric detector, pyroelectric detection device, and electronic instrument
- 专利标题(中): 热电探测器,热电检测装置和电子仪器
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申请号: US13166937申请日: 2011-06-23
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公开(公告)号: US08736010B2公开(公告)日: 2014-05-27
- 发明人: Takafumi Noda
- 申请人: Takafumi Noda
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Global IP Counselors, LLP
- 优先权: JP2010-145919 20100628
- 主分类号: H01L31/058
- IPC分类号: H01L31/058
摘要:
A pyroelectric detector includes a pyroelectric detection element, a support member, and a support part. The pyroelectric detection element has a capacitor including a first electrode, a second electrode, and a pyroelectric body disposed between the first and second electrodes, and a first reducing gas barrier layer that protects the capacitor from reducing gas. The support member includes first and second sides with the pyroelectric detection element being mounted on the first side and the second side facing a cavity. The support member has a mounting member on which the capacitor is mounted and an arm member linked to the mounting member. The support part supports a portion of the support member. An outer peripheral edge of the first reducing gas barrier layer is disposed between and spaced apart from an outer peripheral edge of the mounting member and an outer peripheral edge of the capacitor in plan view.
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