Invention Grant
- Patent Title: Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method
- Patent Title (中): 具有抗静电结构的微机电装置及相应的抗静电法
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Application No.: US13718964Application Date: 2012-12-18
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Publication No.: US08736405B2Publication Date: 2014-05-27
- Inventor: Gabriele Cazzaniga , Luca Coronato
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2008A0714 20080930
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.
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