Invention Grant
US08736405B2 Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method 有权
具有抗静电结构的微机电装置及相应的抗静电法

Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method
Abstract:
An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.
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