Invention Grant
US08739622B2 Capacitive humidity detector with nanoporous hydrophilic dielectric 有权
具有纳米多孔亲水介质的电容式湿度检测器

Capacitive humidity detector with nanoporous hydrophilic dielectric
Abstract:
A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.
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