发明授权
- 专利标题： Imprint apparatus and article manufacturing method
- 专利标题（中）： 印刷装置及制品制造方法
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申请号： US13008377申请日： 2011-01-18
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公开(公告)号： US08740604B2公开(公告)日： 2014-06-03
- 发明人: Hiroshi Sato
- 申请人： Hiroshi Sato
- 申请人地址： JP
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP
- 代理机构： Rossi, Kimms & McDowell LLP
- 优先权： JP2010-009529 20100119
- 主分类号： B05D3/12
- IPC分类号： B05D3/12 ; B05C9/12
摘要：
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result.
公开/授权文献
- US20110177249A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 公开/授权日：2011-07-21
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