Invention Grant
- Patent Title: Non-volatile graphene nanomechanical switch
- Patent Title (中): 非挥发性石墨烯纳米机械开关
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Application No.: US13971165Application Date: 2013-08-20
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Publication No.: US08741700B1Publication Date: 2014-06-03
- Inventor: Dechao Guo , Shu-Jen Han , Fei Liu , Keith Kwong Hon Wong , Jun Yuan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Methods for making non-volatile switches include depositing gate material in a recess of a substrate; depositing drain metal in a recess of the gate material; planarizing the gate material, drain metal, and substrate; forming sidewalls by depositing material on the substrate around the gate material; forming a flexible conductive element between the sidewalls to establish a gap between the flexible conductive element and the gate material, such that the gap separating the flexible conductive element and the gate material is sized to create a negative threshold voltage at the gate material for opening a circuit; and forming a source terminal in electrical contact with the flexible conductive element.
Public/Granted literature
- US20140154851A1 NON-VOLATILE GRAPHENE NANOMECHANICAL SWITCH Public/Granted day:2014-06-05
Information query
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