Invention Grant
- Patent Title: Use of band edge gate metals as source drain contacts
- Patent Title (中): 使用带边栅极金属作为源极漏极触点
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Application No.: US13611736Application Date: 2012-09-12
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Publication No.: US08741753B2Publication Date: 2014-06-03
- Inventor: Kisik Choi , Christian Lavoie , Paul M. Solomon , Bin Yang , Zhen Zhang
- Applicant: Kisik Choi , Christian Lavoie , Paul M. Solomon , Bin Yang , Zhen Zhang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/3205 ; H01L21/00

Abstract:
A device includes a gate stack formed over a channel in a semiconductor substrate. The gate stack includes a layer of gate insulator material, a layer of gate metal overlying the layer of gate insulator material, and a layer of contact metal overlying the layer band edge gate metal. The device further includes source and drain contacts adjacent to the channel. The source and drain contacts each include a layer of the gate metal that overlies and is in direct electrical contact with a doped region of the semiconductor substrate, and a layer of contact metal that overlies the layer of gate metal.
Public/Granted literature
- US20130241008A1 Use of Band Edge Gate Metals as Source Drain Contacts Public/Granted day:2013-09-19
Information query
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