Invention Grant
US08741753B2 Use of band edge gate metals as source drain contacts 有权
使用带边栅极金属作为源极漏极触点

Use of band edge gate metals as source drain contacts
Abstract:
A device includes a gate stack formed over a channel in a semiconductor substrate. The gate stack includes a layer of gate insulator material, a layer of gate metal overlying the layer of gate insulator material, and a layer of contact metal overlying the layer band edge gate metal. The device further includes source and drain contacts adjacent to the channel. The source and drain contacts each include a layer of the gate metal that overlies and is in direct electrical contact with a doped region of the semiconductor substrate, and a layer of contact metal that overlies the layer of gate metal.
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