发明授权
- 专利标题: Electron microscope
- 专利标题(中): 电子显微镜
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申请号: US13505951申请日: 2010-11-01
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公开(公告)号: US08742342B2公开(公告)日: 2014-06-03
- 发明人: Nobuhiro Okai , Yasunari Sohda
- 申请人: Nobuhiro Okai , Yasunari Sohda
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP2009-254553 20091106
- 国际申请: PCT/JP2010/006424 WO 20101101
- 国际公布: WO2011/055520 WO 20110512
- 主分类号: H01J37/04
- IPC分类号: H01J37/04 ; H01J37/145 ; H01J37/14
摘要:
A scanning electron microscope suppresses a beam drift by reducing charging on a sample surface while suppressing resolution degradation upon observation of an insulator sample. An electron microscope includes an electron source and an objective lens that focuses an electron beam emitted from the electron source, which provides an image using a secondary signal generated from the sample irradiated with the electron beam. A magnetic body with a continuous structure and an inside diameter larger than an inside diameter of an upper pole piece that forms the objective lens is provided between the objective lens and the sample.
公开/授权文献
- US20120217393A1 Electron Microscope 公开/授权日:2012-08-30