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US08746065B2 Rotational rate sensor having intermeshing Coriolis elements 有权
旋转速率传感器具有相互啮合的科里奥利元件

Rotational rate sensor having intermeshing Coriolis elements
Abstract:
A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value.
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