Invention Grant
- Patent Title: Acceleration sensor having a damping device
- Patent Title (中): 具有阻尼装置的加速度传感器
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Application No.: US13195510Application Date: 2011-08-01
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Publication No.: US08746066B2Publication Date: 2014-06-10
- Inventor: Johannes Classen , Sebastian Guenther , Harald Steffes
- Applicant: Johannes Classen , Sebastian Guenther , Harald Steffes
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010039069 20100809
- Main IPC: G01P15/08
- IPC: G01P15/08
Abstract:
A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.
Public/Granted literature
- US20120031185A1 ACCELERATION SENSOR HAVING A DAMPING DEVICE Public/Granted day:2012-02-09
Information query
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