发明授权
- 专利标题: Dummy metal design for packaging structures
- 专利标题(中): 用于包装结构的虚拟金属设计
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申请号: US13427430申请日: 2012-03-22
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公开(公告)号: US08753971B2公开(公告)日: 2014-06-17
- 发明人: Tzuan-Horng Liu , Shang-Yun Hou , Shin-Puu Jeng , Wei-Cheng Wu , Hsiu-Ping Wei , Chih-Hua Chen , Chen-Cheng Kuo , Chen-Shien Chen , Ming Hung Tseng
- 申请人: Tzuan-Horng Liu , Shang-Yun Hou , Shin-Puu Jeng , Wei-Cheng Wu , Hsiu-Ping Wei , Chih-Hua Chen , Chen-Cheng Kuo , Chen-Shien Chen , Ming Hung Tseng
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method of forming an integrated circuit structure is provided. The method includes forming a metal pad at a major surface of a semiconductor chip, forming an under-bump metallurgy (UBM) over the metal pad such that the UBM and the metal pad are in contact, forming a dummy pattern at a same level as the metal pad, the dummy pattern formed of a same metallic material as the metal pad and electrically disconnected from the metal pad, and forming a metal bump over the UBM such that the metal bump is electrically connected to the UBM and no metal bump in the semiconductor chip is formed over the dummy pattern.
公开/授权文献
- US20120178252A1 Dummy Metal Design for Packaging Structures 公开/授权日:2012-07-12
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