发明授权
- 专利标题: Capacitive detection type electro-mechanical transducer
- 专利标题(中): 电容式检测型机电换能器
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申请号: US12973733申请日: 2010-12-20
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公开(公告)号: US08754660B2公开(公告)日: 2014-06-17
- 发明人: Atsushi Kandori , Makoto Takagi , Masao Majima
- 申请人: Atsushi Kandori , Makoto Takagi , Masao Majima
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2010-003649 20100112
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; G01D5/24
摘要:
A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.
公开/授权文献
- US20110169510A1 CAPACITIVE DETECTION TYPE ELECTRO-MECHANICAL TRANSDUCER 公开/授权日:2011-07-14
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