Invention Grant
- Patent Title: Method for creating monocrystalline piezoresistors
- Patent Title (中): 制造单晶压敏电阻的方法
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Application No.: US13431399Application Date: 2012-03-27
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Publication No.: US08759136B2Publication Date: 2014-06-24
- Inventor: Hubert Benzel , Heribert Weber
- Applicant: Hubert Benzel , Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011006332 20110329
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
An electrically insulating sheathing for a piezoresistor and a semiconductor material are provided such that the piezoresistor is able to be used in the high temperature range, e.g., for measurements at higher ambient temperatures than 200° C. A doped resistance area is initially laterally delineated by at least one circumferential essentially vertical trench and is undercut by etching over the entire area. An electrically insulating layer is then created on the wall of the trench and the undercut area, so that the resistance area is electrically insulated from the adjacent semiconductor material by the electrically insulating layer.
Public/Granted literature
- US20120248552A1 Method for creating monocrystalline piezoresistors Public/Granted day:2012-10-04
Information query
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