In various embodiments, an integrated circuit die is provided. The integrated circuit die may include a circuit on a surface of a semiconductor substrate that has a peripheral sidewall extending substantially perpendicular to and away from the surface. A first protective layer may cover the sidewall of the semiconductor substrate and peripheral edges of the circuit to provide protection from contaminant diffusion. In some embodiments, a semiconductor substrate is provided that has a plurality of dice contained thereon. Each of the dice may have an integrated circuit region and a peripheral sidewall etched into the semiconductor substrate. A first protective layer may be used to cover the peripheral sidewall of the semiconductor substrate to provide protection from contaminant diffusion. Additional apparatuses, systems, and methods are disclosed.