发明授权
- 专利标题: Pattern inspection apparatus
- 专利标题(中): 图案检验仪
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申请号: US13183792申请日: 2011-07-15
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公开(公告)号: US08761518B2公开(公告)日: 2014-06-24
- 发明人: Hiromu Inoue , Takeshi Fujiwara , Hiroshi Tsukada , Takashi Hirano
- 申请人: Hiromu Inoue , Takeshi Fujiwara , Hiroshi Tsukada , Takashi Hirano
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-162316 20100716
- 主分类号: G06K9/48
- IPC分类号: G06K9/48
摘要:
According to one embodiment, a pattern inspection apparatus includes a first inspection data creation section, a first delay section, a first recognition section, a first extraction section, a first and a second level difference calculation section, a first and a second determination section, and a first logic OR calculation section. The first extraction section extracts data of a sub-resolution pattern from the first inspection data and the first delay data. The first and second level difference calculation section calculate differences between an average output level of a surrounding region for a target pixel of the extracted data from the first inspection data or the first delay data and an output level of the extracted data. The first and second determination sections determine presence or absence of a defect. The first logic OR calculation section calculates logic OR of determination results of the first and second determination sections.
公开/授权文献
- US20120020546A1 PATTERN INSPECTION APPARATUS 公开/授权日:2012-01-26
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