Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US13697072Application Date: 2012-05-16
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Publication No.: US08765540B2Publication Date: 2014-07-01
- Inventor: Haizhou Yin , Huilong Zhu , Zhijiong Luo
- Applicant: Haizhou Yin , Huilong Zhu , Zhijiong Luo
- Applicant Address: unknown Beijing
- Assignee: The Institute of Microelectronics Chinese Academy of Science
- Current Assignee: The Institute of Microelectronics Chinese Academy of Science
- Current Assignee Address: unknown Beijing
- Priority: CN201110166632 20110620
- International Application: PCT/CN2012/000669 WO 20120516
- International Announcement: WO2012/174850 WO 20121227
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66

Abstract:
The present invention provides a semiconductor structure, which comprises: a substrate, a semiconductor base, a semiconductor auxiliary base layer, a cavity, a gate stack, a sidewall spacer, and a source/drain region, wherein the gate stack is located on the semiconductor base; the sidewall spacer is located on the sidewalls of the gate stack; the source/drain region is embedded in the semiconductor base and is located on both sides of the gate stack; the cavity is embedded in the substrate; the semiconductor base is suspended above the cavity, the thickness of the middle portion of the semiconductor base is greater than the thickness of the two end portions of the semiconductor base in the direction of the length of the gate, and the two end portions of the semiconductor base are connected to the substrate in the direction of the width of the gate; and the semiconductor auxiliary base layer is located on the sidewall of the semiconductor base and has an opposite doping type to that of the source/drain region, and the doping concentration of the semiconductor auxiliary base layer is higher than that of the semiconductor base. Correspondingly, the present invention also provides a method for manufacturing a semiconductor structure. According to the present invention, the short channel effect can be suppressed, and the device performance can be improved, thereby reducing the cost and simplifying the process.
Public/Granted literature
- US20130193490A1 Semiconductor Structure and Method for Manufacturing the Same Public/Granted day:2013-08-01
Information query
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