发明授权
US08766260B2 Thin-film transistor and method for manufacturing thin-film transistor 有权
薄膜晶体管及制造薄膜晶体管的方法

Thin-film transistor and method for manufacturing thin-film transistor
摘要:
A substrate; a gate electrode formed above the substrate; a gate insulating film formed above the gate electrode; a crystalline silicon semiconductor layer formed above the gate insulating film; an amorphous silicon semiconductor layer formed above the crystalline silicon semiconductor layer; an organic protective film made of an organic material and formed above the amorphous silicon semiconductor layer; and a source electrode and a drain electrode formed above the amorphous silicon semiconductor layer interposing the organic protective film are included, and a charge density of the negative carriers in the amorphous silicon semiconductor layer is at least 3×1011 cm−2.
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