发明授权
- 专利标题: Thin-film transistor and method for manufacturing thin-film transistor
- 专利标题(中): 薄膜晶体管及制造薄膜晶体管的方法
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申请号: US13606928申请日: 2012-09-07
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公开(公告)号: US08766260B2公开(公告)日: 2014-07-01
- 发明人: Yuji Kishida , Takahiro Kawashima , Arinobu Kanegae , Genshirou Kawashi
- 申请人: Yuji Kishida , Takahiro Kawashima , Arinobu Kanegae , Genshirou Kawashi
- 申请人地址: JP Osaka JP Hyogo
- 专利权人: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人地址: JP Osaka JP Hyogo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
A substrate; a gate electrode formed above the substrate; a gate insulating film formed above the gate electrode; a crystalline silicon semiconductor layer formed above the gate insulating film; an amorphous silicon semiconductor layer formed above the crystalline silicon semiconductor layer; an organic protective film made of an organic material and formed above the amorphous silicon semiconductor layer; and a source electrode and a drain electrode formed above the amorphous silicon semiconductor layer interposing the organic protective film are included, and a charge density of the negative carriers in the amorphous silicon semiconductor layer is at least 3×1011 cm−2.
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