发明授权
- 专利标题: Imprint apparatus and article manufacturing method
- 专利标题(中): 印刷装置及制品制造方法
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申请号: US13004469申请日: 2011-01-11
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公开(公告)号: US08770964B2公开(公告)日: 2014-07-08
- 发明人: Eigo Kawakami
- 申请人: Eigo Kawakami
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2010-004445 20100112
- 主分类号: B29C59/00
- IPC分类号: B29C59/00
摘要:
An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.
公开/授权文献
- US20110169181A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 公开/授权日:2011-07-14
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