发明授权
US08771922B2 Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same 失效
用于抗蚀剂的共聚物,其包含新颖的基于丙烯酸的单体和包含其的抗蚀剂的树脂组合物

Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
摘要:
A resist resin composition includes 100 parts by weight of a copolymer represented by Formula 3 below; 0.5 to 1.5 parts by weight of a photoacid generator and 700 to 1,500 parts by weight of a solvent: wherein R1, R2, and R3 are each independently a C1-30 alkyl group, a C3-30 cycloalkyl group, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group, or an aldehyde group, R4, R5, and R6 are each independently hydrogen or a methyl group, and l, m, n, and o each independently refer to the number of repeating units in a main backbone and satisfy the conditions: l+m+n+o=1, 0≦l/(l+m+n+o)
信息查询
0/0