发明授权
US08771922B2 Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
失效
用于抗蚀剂的共聚物,其包含新颖的基于丙烯酸的单体和包含其的抗蚀剂的树脂组合物
- 专利标题: Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
- 专利标题(中): 用于抗蚀剂的共聚物,其包含新颖的基于丙烯酸的单体和包含其的抗蚀剂的树脂组合物
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申请号: US13432218申请日: 2012-03-28
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公开(公告)号: US08771922B2公开(公告)日: 2014-07-08
- 发明人: Jin Bong Shin , Jin Ho Kim , Dae Hyeon Shin , Seung Jae Lee
- 申请人: Jin Bong Shin , Jin Ho Kim , Dae Hyeon Shin , Seung Jae Lee
- 申请人地址: KR Seoul
- 专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Ladas & Parry LLP
- 优先权: KR10-2011-0028951 20110330
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; C08F236/20 ; C08F118/02
摘要:
A resist resin composition includes 100 parts by weight of a copolymer represented by Formula 3 below; 0.5 to 1.5 parts by weight of a photoacid generator and 700 to 1,500 parts by weight of a solvent: wherein R1, R2, and R3 are each independently a C1-30 alkyl group, a C3-30 cycloalkyl group, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group, or an aldehyde group, R4, R5, and R6 are each independently hydrogen or a methyl group, and l, m, n, and o each independently refer to the number of repeating units in a main backbone and satisfy the conditions: l+m+n+o=1, 0≦l/(l+m+n+o)
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