发明授权
US08772060B2 Method for manufacturing group III nitride semiconductor light emitting element, group III nitride semiconductor light emitting element and lamp
有权
III族氮化物半导体发光元件,III族氮化物半导体发光元件和灯的制造方法
- 专利标题: Method for manufacturing group III nitride semiconductor light emitting element, group III nitride semiconductor light emitting element and lamp
- 专利标题(中): III族氮化物半导体发光元件,III族氮化物半导体发光元件和灯的制造方法
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申请号: US13119127申请日: 2009-09-14
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公开(公告)号: US08772060B2公开(公告)日: 2014-07-08
- 发明人: Hiromitsu Sakai , Takeshi Harada
- 申请人: Hiromitsu Sakai , Takeshi Harada
- 申请人地址: JP Aichi
- 专利权人: Toyoda Gosei Co., Ltd.
- 当前专利权人: Toyoda Gosei Co., Ltd.
- 当前专利权人地址: JP Aichi
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2008-237209 20080916
- 国际申请: PCT/JP2009/004571 WO 20090914
- 国际公布: WO2010/032423 WO 20100325
- 主分类号: H01L33/30
- IPC分类号: H01L33/30 ; H01L33/36 ; H01L21/02 ; H01L33/00
摘要:
The present invention provides a method for manufacturing a group III nitride semiconductor light emitting element, with which warping can be suppressed upon the formation of respective layers on the substrate, a semiconductor layer including a light emitting layer of excellent crystallinity can be formed, and excellent light emission characteristics can be obtained; such a group III nitride semiconductor light emitting element; and a lamp. Specifically disclosed is a method for manufacturing a group III nitride semiconductor light emitting element, in which an intermediate layer, an underlayer, an n-type contact layer, an n-type cladding layer, a light emitting layer, a p-type cladding layer, and a p-type contact layer are laminated in sequence on a principal plane of a substrate, wherein a substrate having a diameter of 4 inches (100 mm) or larger, with having an amount of warping H within a range from 0.1 to 30 μm and at least a part of the edge of the substrate warping toward the principal plane at room temperature, is prepared as the substrate; the X-ray rocking curve full width at half maximum (FWHM) of the (0002) plane is 100 arcsec or less and the X-ray rocking curve FWHM of the (10-10) plane is 300 arcsec or less, in a state where the intermediate layer has been formed on the substrate and where thereafter the underlayer and the n-type contact layer are formed on the intermediate layer; and furthermore the n-type cladding layer, the light emitting layer, the p-type cladding layer, and the p-type contact layer are formed on the n-type contact layer.
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