- 专利标题: Transistor employing vertically stacked self-aligned carbon nanotubes
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申请号: US13303785申请日: 2011-11-23
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公开(公告)号: US08772782B2公开(公告)日: 2014-07-08
- 发明人: Qing Cao , Dechao Guo , Shu-Jen Han , Yu Lu , Keith Kwong Hon Wong
- 申请人: Qing Cao , Dechao Guo , Shu-Jen Han , Yu Lu , Keith Kwong Hon Wong
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L29/12
- IPC分类号: H01L29/12
摘要:
A fin structure including a vertical alternating stack of a first isoelectric point material layer having a first isoelectric point and a second isoelectric material layer having a second isoelectric point less than the first isoelectric point is formed. The first and second isoelectric point material layers become oppositely charged in a solution with a pH between the first and second isoelectric points. Negative electrical charges are imparted onto carbon nanotubes by an anionic surfactant to the solution. The electrostatic attraction causes the carbon nanotubes to be selectively attached to the surfaces of the first isoelectric point material layer. Carbon nanotubes are attached to the first isoelectric point material layer in self-alignment along horizontal lengthwise directions of the fin structure. A transistor can be formed, which employs a plurality of vertically aligned horizontal carbon nanotubes as the channel.
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