发明授权
US08774571B2 Optical device, optical module, and method for manufacturing optical device
有权
光学装置,光学模块以及光学装置的制造方法
- 专利标题: Optical device, optical module, and method for manufacturing optical device
- 专利标题(中): 光学装置,光学模块以及光学装置的制造方法
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申请号: US13590718申请日: 2012-08-21
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公开(公告)号: US08774571B2公开(公告)日: 2014-07-08
- 发明人: Kazunori Shinoda , Shigeki Makino , Hideo Arimoto
- 申请人: Kazunori Shinoda , Shigeki Makino , Hideo Arimoto
- 申请人地址: JP Kanagawa
- 专利权人: Oclaro Japan, Inc.
- 当前专利权人: Oclaro Japan, Inc.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Mattingly & Malur, PC
- 优先权: JP2011-181886 20110823; JP2012-146126 20120628
- 主分类号: G02B6/12
- IPC分类号: G02B6/12
摘要:
An optical device includes a substrate and a first optical waveguide including a mesa. The mesa includes a first lower clad layer portion, a first core layer portion, and a first upper clad layer portion. The first lower clad layer portion, the first core layer portion, and the first upper clad layer portion are disposed in this order from the substrate side. The optical device also includes a first etch stop layer configured to stop etching when the first optical waveguide is formed. The first etch stop layer being laminated over the substrate. The first optical waveguide is laminated on the first etch stop layer.
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