发明授权
- 专利标题: Generated gas collecting method and measuring method
- 专利标题(中): 生成气体采集方法及测量方法
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申请号: US13366101申请日: 2012-02-03
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公开(公告)号: US08776577B2公开(公告)日: 2014-07-15
- 发明人: Akihiro Komatsu , Takahiro Imamura
- 申请人: Akihiro Komatsu , Takahiro Imamura
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Patterson & Sheridan, LLP
- 优先权: JP2011-122780 20110531
- 主分类号: G01N25/00
- IPC分类号: G01N25/00 ; B01D53/02
摘要:
According to one embodiment, a generated gas collecting method collects a generated gas after exposing the interior of a chamber to an organic gas having a boiling point higher than that of the generated gas.
公开/授权文献
- US20120304739A1 GENERATED GAS COLLECTING METHOD AND MEASURING METHOD 公开/授权日:2012-12-06
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