Invention Grant
- Patent Title: Temperature measuring apparatus and temperature measuring method
- Patent Title (中): 温度测量仪和温度测量方法
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Application No.: US13231027Application Date: 2011-09-13
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Publication No.: US08777483B2Publication Date: 2014-07-15
- Inventor: Jun Yamawaku , Chishio Koshimizu , Tatsuo Matsudo , Kenji Nagai
- Applicant: Jun Yamawaku , Chishio Koshimizu , Tatsuo Matsudo , Kenji Nagai
- Applicant Address: JP
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2010-205401 20100914
- Main IPC: G01K1/00
- IPC: G01K1/00 ; G01J5/00

Abstract:
The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.
Public/Granted literature
- US20120063486A1 TEMPERATURE MEASURING APPARATUS AND TEMPERATURE MEASURING METHOD Public/Granted day:2012-03-15
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