Invention Grant
- Patent Title: Methods and apparatuses for dynamic probe adjustment
- Patent Title (中): 用于动态探头调节的方法和装置
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Application No.: US13673111Application Date: 2012-11-09
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Publication No.: US08781779B2Publication Date: 2014-07-15
- Inventor: Richard James Casler, Jr. , Fenglei Du , Stephen Craig Fullerton
- Applicant: Formfactor, Inc.
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G01C3/00
- IPC: G01C3/00

Abstract:
An improved method and apparatus for automatically aligning probe pins to the test or bond pads of semiconductor devices under changing conditions. In at least one embodiment, a dynamic model is used to predict an impact of changing conditions to wafer probing process. This reduces the need for frequent measurements and calibrations during probing and testing, thereby increasing the number of dice that can be probed and tested in a given period of time and increasing the accuracy of probing at the same time. Embodiments of the present invention also make it possible to adjust positions of probe pins and pads in response to the changing conditions while they are in contact with each other.
Public/Granted literature
- US20130103338A1 METHODS AND APPARATUSES FOR DYNAMIC PROBE ADJUSTMENT Public/Granted day:2013-04-25
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