发明授权
- 专利标题: Micromachined force-balance feedback accelerometer with optical displacement detection
- 专利标题(中): 微机械力平衡反馈加速度计与光学位移检测
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申请号: US13324012申请日: 2011-12-13
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公开(公告)号: US08783106B1公开(公告)日: 2014-07-22
- 发明人: Gregory N. Nielson , Eric Langlois , Michael Baker , Murat Okandan , Robert Anderson
- 申请人: Gregory N. Nielson , Eric Langlois , Michael Baker , Murat Okandan , Robert Anderson
- 申请人地址: US NM Albuquerque
- 专利权人: Sandia Corporation
- 当前专利权人: Sandia Corporation
- 当前专利权人地址: US NM Albuquerque
- 代理商 Helen S. Baca
- 主分类号: G01P15/093
- IPC分类号: G01P15/093
摘要:
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.