Invention Grant
- Patent Title: Epitaxial growth of in-plane nanowires and nanowire devices
- Patent Title (中): 平面内纳米线和纳米线器件的外延生长
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Application No.: US14032904Application Date: 2013-09-20
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Publication No.: US08785226B2Publication Date: 2014-07-22
- Inventor: Seung Chang Lee , Steven R. J. Brueck
- Applicant: STC.UNM
- Applicant Address: US NM Albuquerque
- Assignee: STC.UNM
- Current Assignee: STC.UNM
- Current Assignee Address: US NM Albuquerque
- Agency: MH2 Technology Law Group, LLP
- Main IPC: H01S5/10
- IPC: H01S5/10 ; H01S5/323 ; H01S5/343 ; H01L21/00

Abstract:
Exemplary embodiments provide semiconductor nanowires and nanowire devices/applications and methods for their formation. In embodiments, in-plane nanowires can be epitaxially grown on a patterned substrate, which are more favorable than vertical ones for device processing and three-dimensional (3D) integrated circuits. In embodiments, the in-plane nanowire can be formed by selective epitaxy utilizing lateral overgrowth and faceting of an epilayer initially grown in a one-dimensional (1D) nanoscale opening. In embodiments, optical, electrical, and thermal connections can be established and controlled between the nanowire, the substrate, and additional electrical or optical components for better device and system performance.
Public/Granted literature
- US20140064312A1 EPITAXIAL GROWTH OF IN-PLANE NANOWIRES AND NANOWIRE DEVICES Public/Granted day:2014-03-06
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