发明授权
- 专利标题: Organic TFT array substrate and manufacture method thereof
- 专利标题(中): 有机TFT阵列基板及其制造方法
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申请号: US13479048申请日: 2012-05-23
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公开(公告)号: US08785264B2公开(公告)日: 2014-07-22
- 发明人: Xuehui Zhang
- 申请人: Xuehui Zhang
- 申请人地址: CN Beijing
- 专利权人: BOE Technology Group Co., Ltd.
- 当前专利权人: BOE Technology Group Co., Ltd.
- 当前专利权人地址: CN Beijing
- 代理机构: Ladas & Parry LLP
- 优先权: CN201110136011 20110524
- 主分类号: H01L21/84
- IPC分类号: H01L21/84
摘要:
According to an embodiment of the disclosed technology, a manufacture method of an organic thin film transistor array substrate is provided. The method comprises: forming a first pixel electrode, a source electrode, a drain electrode and a data line in a first patterning process; forming an organic semiconductor island and a gate insulating island in a second patterning process; forming a data pad region in a third patterning process; and forming a second pixel electrode, a gate electrode and a gate line in a fourth patterning process.
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