Invention Grant
US08785330B2 Method for producing a structure comprising at least one active part having zones of different thicknesses
有权
用于制造包括至少一个具有不同厚度的区域的活性部件的结构的方法
- Patent Title: Method for producing a structure comprising at least one active part having zones of different thicknesses
- Patent Title (中): 用于制造包括至少一个具有不同厚度的区域的活性部件的结构的方法
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Application No.: US13682847Application Date: 2012-11-21
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Publication No.: US08785330B2Publication Date: 2014-07-22
- Inventor: Philippe Robert , Sophie Giroud
- Applicant: Commissariat a l'energie atomique et aux energies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1160973 20111130
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461
Abstract:
A method for producing a structure including an active part with a first and a second suspended zone. The method includes machining the front face of a first substrate to define the lateral contours of at least one first suspended zone according to a first thickness less than that of the first substrate forming a stop layer of etching of the first suspended zone under the suspended zone, forming on the front face of the first substrate a sacrificial layer, machining from the rear face of the first substrate up to releasing the sacrificial layer to form at least one second suspended zone to reach the stop layer of the first suspended zone, and releasing the first and second suspended zones.
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