Invention Grant
US08786863B2 Transmitted wavefront measuring method, refractive-index distribution measuring method, and transmitted wavefront measuring apparatus that calculate a frequency distribution and obtain a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution
有权
发射波前测量方法,折射率分布测量方法和透射波前测量装置,其基于频率分布中的主频谱计算频率分布并获得对象的发射波阵面
- Patent Title: Transmitted wavefront measuring method, refractive-index distribution measuring method, and transmitted wavefront measuring apparatus that calculate a frequency distribution and obtain a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution
- Patent Title (中): 发射波前测量方法,折射率分布测量方法和透射波前测量装置,其基于频率分布中的主频谱计算频率分布并获得对象的发射波阵面
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Application No.: US12728878Application Date: 2010-03-22
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Publication No.: US08786863B2Publication Date: 2014-07-22
- Inventor: Seima Kato
- Applicant: Seima Kato
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-074273 20090325
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A transmitted wavefront measuring method comprises the steps of emitting light 101 from a light source 100 onto an object to be measured 120 to receive interfering light transmitted through the object and a diffraction grating 130 on a light receiving portion 140 disposed at a predetermined distance from the diffraction grating to measure an intensity distribution of the interfering light T10, performing a Fourier transform of the intensity distribution to calculate a frequency distribution T20, and obtaining a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution T30 to T90. The step of obtaining the transmitted wavefront comprises the steps of performing an inverse Fourier transform of the primary frequency spectrum with reference to a grating frequency of the diffraction grating to calculate a complex amplitude of the interfering light T60, and obtaining the transmitted wavefront based on the complex amplitude T90.
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