Invention Grant
US08786933B2 Fabrication of a floating rocker MEMS device for light modulation 有权
用于光调制的浮动摇臂MEMS装置的制造

Fabrication of a floating rocker MEMS device for light modulation
Abstract:
The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
Public/Granted literature
Information query
Patent Agency Ranking
0/0