发明授权
- 专利标题： Temperature controller for gas laser
- 专利标题（中）： 气体激光器温度控制器
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申请号： US13936819申请日： 2013-07-08
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公开(公告)号： US08787413B2公开(公告)日： 2014-07-22
- 发明人: Yukio Watanabe , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
- 申请人： Gigaphoton Inc.
- 申请人地址： JP Tochigi
- 专利权人： Gigaphoton Inc.
- 当前专利权人： Gigaphoton Inc.
- 当前专利权人地址： JP Tochigi
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2009-039568 20090223; JP2009-039569 20090223; JP2010-035305 20100219
- 主分类号： H01S3/04
- IPC分类号： H01S3/04
摘要：
A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.
公开/授权文献
- US20130294470A1 TEMPERATURE CONTROLLER FOR GAS LASER 公开/授权日：2013-11-07
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