Invention Grant
- Patent Title: Method of manufacturing magnetic recording medium, and magnetic recording and reproducing device
- Patent Title (中): 磁记录介质的制造方法以及磁记录再生装置
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Application No.: US13742657Application Date: 2013-01-16
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Publication No.: US08790525B2Publication Date: 2014-07-29
- Inventor: Makoto Hiwatari , Akira Yamane , Tomoo Shige , Akira Sakawaki
- Applicant: Showa Denko K.K.
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-010399 20120120
- Main IPC: B44C1/22
- IPC: B44C1/22 ; G11B5/84 ; G11B5/855 ; G11B5/31 ; H01L21/311

Abstract:
A method of manufacturing a magnetic recording medium is provided. The method includes: forming a magnetic layer 2 on a non-magnetic substrate 1; forming a mask layer 3 on the magnetic layer 2; forming a resist layer 4 which is patterned into a predetermined shape on the mask layer 3; patterning the mask layer 3 into a shape corresponding to the resist layer 4 using the resist layer 4; patterning the magnetic layer 2 into a shape corresponding to the mask layer 3 using the patterned mask layer 3; and removing the mask layer 3 that remains on the magnetic layer 2 by reactive plasma etching. The reactive plasma etching is performed under an atmosphere containing an organic compound having at least one kind or plural kinds of functional groups selected from a hydroxyl group, a carbonyl group, a hydroxy carbonyl group, an alkoxy group, and an ether group.
Public/Granted literature
- US20130188278A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING DEVICE Public/Granted day:2013-07-25
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