Invention Grant
US08790993B2 Method for molecular bonding of silicon and glass substrates 有权
硅和玻璃基板的分子键合方法

  • Patent Title: Method for molecular bonding of silicon and glass substrates
  • Patent Title (中): 硅和玻璃基板的分子键合方法
  • Application No.: US13953679
    Application Date: 2013-07-29
  • Publication No.: US08790993B2
    Publication Date: 2014-07-29
  • Inventor: Sebastien KerdilesDaniel Delprat
  • Applicant: SOITEC
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1058299 20101012
  • Main IPC: H01L21/30
  • IPC: H01L21/30 H01L21/46
Method for molecular bonding of silicon and glass substrates
Abstract:
A method for bonding a first substrate having a first surface to a second substrate having a second surface. This method includes the steps of holding the first substrate by at least two support points, positioning the first substrate and the second substrate so that the first surface and the second surface face each other, deforming the first substrate by applying between at least one pressure point and the two support points a strain toward the second substrate, bringing the deformed first surface and the second surface into contact, and progressively releasing the strain to facilitate bonding of the substrates while minimizing or avoiding the trapping of air bubbles between the substrates.
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