发明授权
- 专利标题: Sidewalls of electroplated copper interconnects
- 专利标题(中): 电镀铜互连的侧壁
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申请号: US13525823申请日: 2012-06-18
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公开(公告)号: US08791005B2公开(公告)日: 2014-07-29
- 发明人: Mukta G. Farooq , John A. Fitzsimmons , Troy L. Graves-Abe
- 申请人: Mukta G. Farooq , John A. Fitzsimmons , Troy L. Graves-Abe
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 L. Jeffrey Kelly; Katherine S Brown
- 主分类号: H01L23/532
- IPC分类号: H01L23/532
摘要:
A structure formed in an opening having a substantially vertical sidewall defined by a non-metallic material and having a substantially horizontal bottom defined by a conductive pad, the structure including a diffusion barrier covering the sidewall and a fill composed of conductive material. The structure including a first intermetallic compound separating the diffusion barrier from the conductive material, the first intermetallic compound comprises an alloying material and the conductive material, and is mechanically bound to the conductive material, the alloying material is at least one of the materials selected from the group of chromium, tin, nickel, magnesium, cobalt, aluminum, manganese, titanium, zirconium, indium, palladium, and silver; and a first high friction interface located between the diffusion barrier and the first intermetallic compound and parallel to the sidewall of the opening, wherein the first high friction interface results in a mechanical bond between the diffusion barrier and the first intermetallic compound.
公开/授权文献
- US20130334691A1 SIDEWALLS OF ELECTROPLATED COPPER INTERCONNECTS 公开/授权日:2013-12-19
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