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US08795595B2 Sensor substrate systems and methods 有权
传感器基板系统和方法

Sensor substrate systems and methods
摘要:
A sensing apparatus may include a substrate having a first side for a sensing element and a second side for electronics, the substrate may have a at least one via from the first side of the substrate to the second side of the substrate, the at least one via may be hermetically sealed with an optically transmissive material.
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