发明授权
US08796092B2 Method for manufacturing semiconductor device with first and second gates over buried bit line 有权
用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法

  • 专利标题: Method for manufacturing semiconductor device with first and second gates over buried bit line
  • 专利标题(中): 用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
  • 申请号: US13745635
    申请日: 2013-01-18
  • 公开(公告)号: US08796092B2
    公开(公告)日: 2014-08-05
  • 发明人: Hyung Jin Park
  • 申请人: SK hynix Inc.
  • 申请人地址: KR Icheon
  • 专利权人: SK Hynix Inc.
  • 当前专利权人: SK Hynix Inc.
  • 当前专利权人地址: KR Icheon
  • 优先权: KR10-2010-0071529 20100723
  • 主分类号: H01L29/66
  • IPC分类号: H01L29/66
Method for manufacturing semiconductor device with first and second gates over buried bit line
摘要:
A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to a silicon layer formed over a gate, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; a plurality of gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; a silicon layer disposed on the upper portion and sidewalls of the gate; and a second plug coupled to the silicon layer disposed over the gate.
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