Invention Grant
- Patent Title: Diffusion barrier for oppositely doped portions of gate conductor
- Patent Title (中): 栅极导体相对掺杂部分的扩散势垒
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Application No.: US13352851Application Date: 2012-01-18
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Publication No.: US08796130B2Publication Date: 2014-08-05
- Inventor: Jeffrey P. Gambino , Russell T. Herrin , Mark D. Jaffe , Laura J. Schutz
- Applicant: Jeffrey P. Gambino , Russell T. Herrin , Mark D. Jaffe , Laura J. Schutz
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
A method patterns a polysilicon gate over two immediately adjacent, opposite polarity transistor devices. The method patterns a mask over the polysilicon gate. The mask has an opening in a location where the opposite polarity transistor devices abut one another. The method then removes some (a portion) of the polysilicon gate through the opening to form at least a partial recess (or potentially a complete opening) in the polysilicon gate. The recess separates the polysilicon gate into a first polysilicon gate and a second polysilicon gate. After forming the recess, the method dopes the first polysilicon gate using a first polarity dopant and dopes the second polysilicon gate using a second polarity dopant having an opposite polarity of the first polarity dopant.
Public/Granted literature
- US20130181293A1 DIFFUSION BARRIER FOR OPPOSITELY DOPED PORTIONS OF GATE CONDUCTOR Public/Granted day:2013-07-18
Information query
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