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US08796662B2 Semiconductor devices with vertical structure including data storage layer or pattern 有权
具有垂直结构的半导体器件包括数据存储层或图案

Semiconductor devices with vertical structure including data storage layer or pattern
Abstract:
A semiconductor device includes a first horizontal molding pattern, a horizontal electrode pattern disposed on the first horizontal molding pattern, and a second horizontal molding pattern disposed on the horizontal electrode pattern. A vertical structure extends through the horizontal patterns. The vertical structure includes a vertical electrode pattern, a data storage pattern interposed between the vertical electrode pattern and the horizontal patterns, a first buffer pattern interposed between the data storage pattern and the first molding pattern, and a second buffer pattern interposed between the data storage pattern and the second molding pattern and spaced apart from the first buffer pattern.
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