Invention Grant
- Patent Title: Hybrid intergrated component and method for the manufacture thereof
- Patent Title (中): 混合组合成分及其制造方法
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Application No.: US13888920Application Date: 2013-05-07
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Publication No.: US08796791B2Publication Date: 2014-08-05
- Inventor: Axel Franke , Patrick Wellner , Lars Tebje
- Applicant: Axel Franke , Patrick Wellner , Lars Tebje
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012208053 20120514
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.
Public/Granted literature
- US20130299927A1 HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF Public/Granted day:2013-11-14
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