发明授权
US08797625B2 Actuator, method for manufacturing actuator, and optical scanner 有权
执行器,制造执行器的方法和光学扫描仪

Actuator, method for manufacturing actuator, and optical scanner
摘要:
An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
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