发明授权
- 专利标题: Reducing agglomeration of particles while manufacturing a lapping plate using oil-based slurry
- 专利标题(中): 在使用油基浆料制造研磨板的同时减少颗粒的团聚
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申请号: US11413401申请日: 2006-04-28
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公开(公告)号: US08801496B2公开(公告)日: 2014-08-12
- 发明人: Richard D. Bunch , Juan Francisco Coronado Nuno , Sergio Raul Elizalde Rojo , Ernesto Arturo Marguez Waldthausen
- 申请人: Richard D. Bunch , Juan Francisco Coronado Nuno , Sergio Raul Elizalde Rojo , Ernesto Arturo Marguez Waldthausen
- 申请人地址: NL Amsterdam
- 专利权人: HGST Netherlands B.V.
- 当前专利权人: HGST Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 主分类号: B24B49/00
- IPC分类号: B24B49/00
摘要:
Embodiments of the present invention pertain to reducing agglomeration of particles while manufacturing a lapping plate using an oil-based slurry. According to one embodiment, an oil-based slurry with particles of a known size is applied to a lapping plate. The oil-based slurry is ultrasonically mixed while applying the oil-based slurry to the lapping plate in order to reduce agglomeration of the particles.
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