发明授权
- 专利标题: Method for handling a semiconductor wafer assembly
- 专利标题(中): 处理半导体晶片组件的方法
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申请号: US13624656申请日: 2012-09-21
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公开(公告)号: US08802465B2公开(公告)日: 2014-08-12
- 发明人: Trung Tri Doan , Chen-Fu Chu
- 申请人: SemiLEDS Optoelectronics Co., Ltd.
- 申请人地址: TW Chu-Nan
- 专利权人: SemiLEDS Optoelectronics Co., Ltd.
- 当前专利权人: SemiLEDS Optoelectronics Co., Ltd.
- 当前专利权人地址: TW Chu-Nan
- 代理商 Stephen A. Gratton
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Systems and methods for fabricating a light emitting diode include forming a multilayer epitaxial structure above a carrier substrate; depositing at least one metal layer above the multilayer epitaxial structure; removing the carrier substrate.
公开/授权文献
- US20140087499A1 METHOD FOR HANDLING A SEMICONDUCTOR WAFER ASSEMBLY 公开/授权日:2014-03-27
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